Published in
AIP Publishing, Journal of Applied Physics, 4(124), p. 045703
DOI: 10.1063/1.5034213
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AsH3 gas-phase ex situ doping 3D silicon structures
Journal article published in 2018 by
Ray Duffy 
,
Kevin Thomas,
Emmanuele Galluccio ,
Gioele Mirabelli ,
Maeva Sultan ,
Noel Kennedy,
Nikolay Petkov,
Graeme Maxwell,
Alan Hydes,
Dan O'Connell ,
Colin Lyons ,
Brendan Sheehan,
Michael Schmidt ,
Justin D. Holmes,
Paul K. Hurley
and other authors.
,
Kevin Thomas,
Emmanuele Galluccio ,
Gioele Mirabelli ,
Maeva Sultan ,
Noel Kennedy,
Nikolay Petkov,
Graeme Maxwell,
Alan Hydes,
Dan O'Connell ,
Colin Lyons ,
Brendan Sheehan,
Michael Schmidt ,
Justin D. Holmes,
Paul K. Hurley
and other authors.
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
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