Published in
International Conference on Extreme Ultraviolet Lithography 2017, 2017
DOI: 10.1117/12.2281624
Links
Tools
A new objective for EUV lithography, EUV microscopy, and 2D x-ray imaging
Proceedings article published in 2017 by
Philip C. Efthimion,
Manfred Bitter,
Kenneth W. Hill,
Jian Lu,
Brian F. Kraus,
Lan Gao,
Luis F. Delgado-Aparicio,
Novimir A. Pablant 
