Published in
Elsevier, Diamond and Related Materials, 2-3(18), p. 419-422, 2009
DOI: 10.1016/j.diamond.2008.10.030
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Properties of boron carbon nitride (BCN) film after plasma ashing
Journal article published in 2009 by
M. K. Mazumder,
H. Aoki,
T. Masuzumi,
M. Hara,
D. Watanabe,
C. Kimura,
M. Fukagawa 
,
M. Umeda,
M. Kusuhara,
T. Sugino
,
M. Umeda,
M. Kusuhara,
T. Sugino
This paper was not found in any repository, but could be made available legally by the author.
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