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Far IR transmission characteristics of silicon nitride films using fourier transform spectroscopy

Proceedings article published in 2009 by D. Ferrusca, E. Castillo-Domínguez ORCID, M. Velázquez, D. Hughes, A. Serrano, A. Torres-Jácome
This paper was not found in any repository; the policy of its publisher is unknown or unclear.
This paper was not found in any repository; the policy of its publisher is unknown or unclear.

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