Deep Dry Etching of Silicon with Scallop Size Uniformly Larger than 300 nm
Journal article published in 2018 by
Yuanwei Lin 
,
Renzhi Yuan,
Xinshuai Zhang,
Zhenpeng Chen,
Haimiao Zhang,
Ziduo Su,
Shengjun Guo,
Xiaoxin Wang,
Chun Wang
,
Renzhi Yuan,
Xinshuai Zhang,
Zhenpeng Chen,
Haimiao Zhang,
Ziduo Su,
Shengjun Guo,
Xiaoxin Wang,
Chun Wang
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