Published in
AIP Publishing, Journal of Vacuum Science and Technology A, 4(26), p. 996-1001, 2008
DOI: 10.1116/1.2936225
Links
Tools
Effects of manganese oxide–mixed abrasive slurry on the tetraethyl orthosilicate oxide chemical mechanical polishing for planarization of interlayer dielectric film in the multilevel interconnection
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
Data provided by 
