Published in
Beilstein-Institut, Beilstein Journal of Nanotechnology, (9), p. 2106-2113
DOI: 10.3762/bjnano.9.199
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Phosphorus monolayer doping (MLD) of silicon on insulator (SOI) substrates
Journal article published in 2018 by
Noel Kennedy 
,
Ray Duffy,
Luke Eaton ,
Dan O’Connell,
Scott Monaghan ,
Shane Garvey,
James Connolly,
Chris Hatem,
Justin D. Holmes,
Brenda Long
,
Ray Duffy,
Luke Eaton ,
Dan O’Connell,
Scott Monaghan ,
Shane Garvey,
James Connolly,
Chris Hatem,
Justin D. Holmes,
Brenda Long
This paper is made freely available by the publisher.
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