3D Volumetric Energy Deposition of Focused Helium Ion Beam Lithography: Visualization, Modeling, and Applications in Nanofabrication
Journal article published in 2018 by
Jingxuan Cai,
Zhouyang Zhu,
Paul F. A. Alkemade,
Emile van Veldhoven,
Qianjin Wang,
Haixiong Ge,
Sean P. Rodrigues,
Wenshan Cai 
,
Wen-Di Li
,
Wen-Di Li
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