The effects of ICP dry etching and HF wet etching on the morphology of SiO2 surface
Journal article published in 2018 by
Kazy F. Shariar 
,
Jie Zhang,
Keith Coasey,
Md Abu Sufian,
Roddell Remy,
Jing Qu,
Michael Mackay,
Yuping Zeng
,
Jie Zhang,
Keith Coasey,
Md Abu Sufian,
Roddell Remy,
Jing Qu,
Michael Mackay,
Yuping Zeng
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